Flip chip interconnection pad layout

ABSTRACT

A flip chip interconnect pad layout has the die signal pads are arranged on the die surface near the perimeter of the die, and the die power and ground pads arranged on the die surface inboard from the signal pads; and has the signal pads on the corresponding package substrate arranged in a manner complementary to the die pad layout and the signal lines routed from the signal pads beneath the die edge away from the die footprint, and has the power and ground lines routed to vias beneath the die footprint. Also, a flip chip semiconductor package in which the flip chip interconnect pad layouts have the die signal pads situated in the marginal part of the die and the die power and ground pads arranged on the die surface inboard from the signal pads, and the corresponding package substrates have signal pads arranged in a manner complementary to the die pad layout and signal lines routed from the signal pads beneath the die edge away from the die footprint.

CLAIM OF DOMESTIC PRIORITY

The present application is a continuation of, claims priority to, andfully incorporates herein by reference U.S. patent application Ser. No.11/372,989, filed Mar. 10, 2006, which is a division of U.S. applicationSer. No. 10/983,898, now U.S. Pat. No. 7,034,391, filed Nov. 8, 2004,titled “Flip chip interconnection pad layout”, which claims priorityfrom U.S. Provisional Application No. 60/518,434, filed Nov. 8, 2003,titled “Flip chip interconnection pad layout”.

BACKGROUND

This invention relates to semiconductor packaging and, particularly, tointerconnect pad layout for flip chip interconnect.

Flip chip packages include a semiconductor die mounted onto a packagesubstrate with the active side of the die facing the substrate.Interconnection of the circuitry in the die with circuitry in thesubstrate is made by way of bumps which are attached to an array ofinterconnect pads on the die, and bonded to a corresponding(complementary) array of interconnect pads on the substrate.

The pads on the die for the signal, power and ground functions of thedie are conventionally distributed throughout the array, and thecorresponding pads on the substrate are connected to appropriatecircuitry to the external second level interconnects. The second levelinterconnects have a greater pitch than the flip chip interconnects, andso the routing on the substrate conventionally “fans out”. The fan outrouting between the pads on the die and the external pins of the packageis formed on multiple metal layers within the package substrate.

Multiple layer substrates are expensive, and in conventional flip chipconstructs the substrate alone typically accounts for more than half thepackage cost (about 60% in some typical instances).

In conventional flip chip constructs the escape routing patterntypically introduces additional electrical parasitics, because therouting includes short runs of unshielded wiring and vias between wiringlayers in the signal transmission path. Electrical parasitics cansignificantly limit package performance.

SUMMARY

The invention is directed to flip chip interconnect pad layouts havingall or substantially all the signal pads situated in the marginal partof the die, and corresponding package substrates.

According to the invention, the die signal pads are arranged on the diesurface near the perimeter of the die, and the die power and ground padsare arranged on the die surface inboard from the signal pads. Also,according to the invention, the signal pads on the corresponding packagesubstrate are arranged in a manner complementary to the die pad layout,and the signal lines are routed from the signal pads beneath the dieedge away from the die footprint, and the power and ground lines arerouted to vias beneath the die footprint.

The pad layouts provide for higher signal trace escape routing densityat the chip margin. The package substrates have fewer metal layers, sothat packages constructed using the pad layout of the invention can bemade at significantly lower cost. Because there are fewer metal layers,and because the number of vias is reduced (and vias can be eliminatedentirely from the signal transmission path), electrical parasitics arereduced, and the package can have improved performance.

In one general aspect the invention features a die pad layout for flipchip interconnect having signal pads located primarily near theperimeter of the die, and having ground and power pads located primarilyinboard from the signal pads.

In some embodiments the signal pads are arranged in a row generallyparallel to the die edge. Or, the signal pads are arranged in an array,as for example in two or more rows parallel to a die edge; in some suchembodiments the pads in adjacent rows are staggered. The area of the dieon which the row or array of signal pads is disposed may be referred toherein as a “peripheral region” of the die.

In some embodiments the ground and power pads are arranged in an arraynear the center of the die; in some such embodiments the ground andpower pads are arranged in a rectangular array, and in some embodimentsa central area of the die has no pads. Or, the power and ground pads arearranged near the signal pads; in some such embodiments the ground andpower pads are arranged on a row parallel to the die edge, and in someembodiments the ground and power pads are arranged in an array near thesignal pads, as for example in two or more rows parallel to the dieedge. The area of the die on which the row or array of power/ground padsis disposed may be referred to herein as an “inboard region” of the die.

In another general aspect the invention features a semiconductor diehaving pad layout as described above.

In another general aspect the invention features a flip chip packageincluding a semiconductor die having pad layout as described above,connected onto a substrate having interconnect pads arranged in a mannercomplementary to the die pad layout, in which the escape routing for thesignal lines is formed in the upper metal layer, and the ground andpower routing drops through vias to one or more lower metal layers.

In another general aspect the invention features a substrate for flipchip mount, having signal pads located in the margin of the diefootprint, and having signal escape lines running in an upper metallayer outwardly and away from the die footprint; and having power padsand ground pads located inwardly from the signal pads and ground andpower lines dropping through vias to lower metal layers. In someembodiments the signal pads are arranged in a row generally parallel tothe edge of the die footprint. Or, the signal pads are arranged in anarray, as for example in two or more rows parallel to the edge of thedie footprint; in some such embodiments the pads in adjacent rows arestaggered.

In some embodiments the ground and power pads are arranged in an arraynear the center of the die attach region; in some such embodiments theground and power pads are arranged in a rectangular array, and in someembodiments a central area of the die attach region has no pads. Or, thepower and ground pads are arranged near the signal pads; in some suchembodiments the ground and power pads are arranged on a row parallel tothe edge of the die footprint, and in some embodiments the ground andpower pads are arranged in an array near the signal pads, as for examplein two or more rows parallel to the edge of the die footprint.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagrammatic sketch in a plan view showing a conventionalpad layout on a die for a flip chip package.

FIG. 2 is a diagrammatic sketch in a plan view showing an arrangement ofpads and routing on a flip chip substrate corresponding to the die padlayout of FIG. 1.

FIG. 3 is a diagrammatic sketch in a plan view showing a pad layout on adie for a flip chip package according to an embodiment of the invention.

FIG. 4 is a diagrammatic sketch in a plan view showing an arrangement ofpads and routing on a flip chip substrate corresponding to the die padlayout of FIG. 3 according to an embodiment of the invention.

FIG. 5 is a diagrammatic sketch in an idealized sectional view showing aportion of a flip chip mounted on a substrate having a die pad layoutand substrate pad arrangement according to the invention.

FIG. 6A is a diagrammatic sketch in a plan view showing a pad layout ona die for a flip chip package according to another embodiment of theinvention.

FIG. 6B is a diagrammatic sketch in a plan view showing a portion of anarrangement of pads and routing on a flip chip substrate correspondingto the die pad layout of FIG. 6A according to an embodiment of theinvention.

FIG. 7A is a diagrammatic sketch in a plan view showing a pad layout ona die for a flip chip package according to another embodiment of theinvention.

FIG. 7B is a diagrammatic sketch in a plan view showing a portion of anarrangement of pads and routing on a flip chip substrate correspondingto the die pad layout of FIG. 7A according to an embodiment of theinvention.

FIG. 8A is a diagrammatic sketch in a plan view showing a pad layout ona die for a flip chip package according to another embodiment of theinvention.

FIG. 8B is a diagrammatic sketch in a plan view showing a portion of anarrangement of pads and routing on a flip chip substrate correspondingto the die pad layout of FIG. 8A according to an embodiment of theinvention.

FIG. 9A is a diagrammatic sketch in a plan view showing a pad layout ona die for a flip chip package according to another embodiment of theinvention.

FIG. 9B is a diagrammatic sketch in a plan view showing a portion of anarrangement of pads and routing on a flip chip substrate correspondingto the die pad layout of FIG. 9A according to an embodiment of theinvention.

DETAILED DESCRIPTION

The invention will now be described in further detail by reference tothe drawings, which illustrate alternative embodiments of the invention.The drawings are diagrammatic, showing features of the invention andtheir relation to other features and structures, and are not made toscale. For improved clarity of presentation, in the Figs. illustratingembodiments of the invention, elements corresponding to elements shownin other drawings are not all particularly renumbered, although they areall readily identifiable in all the Figs.

In a conventional flip chip package, the input/output pads (collectivelythe “signal” pads) on the die are arranged in an area arraysubstantially covering the active face 12 of the chip, as shown by wayof illustration in a plan view generally at 10 in FIG. 1. The signalpads (e.g., 18, 19), power pads (e.g., 14), and ground pads (e.g., 16)(collectively the “power/ground pads”), directed respectively to thesignal, power and ground functions of the die, are distributedthroughout the multiple rows and columns within the array and,particularly, some of the signal pads (e.g., 18) are arranged on theperimeter of the array, while others (e.g., 19) are not. Ordinarily somedesign effort is made to arrange the pads so that the various signalpads are surrounded by, or at least adjacent to, power pads and/orground pads.

Many conventional flip chip packages are made using ceramic substrates.Ceramic substrates can be made with a very large number of layers veryinexpensively, and blind vias can be made in ceramic layers withoutdifficulty. In a conventional chip as illustrated in FIG. 1, made foruse with a conventional ceramic substrate, the pad pitch is typically isthe range 150 μm to 250 μm, and a 225 μm grid pitch is typical of manychips.

Accordingly, in the conventional package the fan out routing in thesubstrate, that is, the wiring on the substrate that connects thecorresponding pads on the substrate with the external terminals of thepackage, is implemented in multiple metal layers patterned to providethe signal wiring and power/ground wiring. An arrangement of substratepads corresponding to the die pad layout of FIG. 1 is shown by way ofillustration in a plan view generally at 20 in FIG. 2. The signal pads(e.g., 28, 29), power pads (e.g., 24), and ground pads (e.g., 26), arearranged in a complementary array on the substrate surface 22 so thatthey can receive and be bonded respectively to the signal, power andground bumps attached to the corresponding pads on the die. In theconventional arrangement some of the pads associated with signal routing(e.g., 28) are at the perimeter of the array, while others are not(e.g., 29). Escape routing for the signal pads on the perimeter of thearray can directly cross beneath the die edge (indicated at 23) astraces 281 in the uppermost metal layer of the substrate. Pads on thesubstrate that are not at the perimeter of the array are connected todeeper metal layers in the substrate by way of short traces and vias. InFIG. 2, for illustration, signal pads 29 are connected by way of shorttraces (signal “stubs” or “jogs”) (e.g., 291) through signal vias (e.g.,292) to signal traces in one of several metal layers beneath; power pads24 are connected by way of short traces (power “stubs” or “jogs”) (e.g.,241) through power vias (e.g., 242) to power traces in a metal layerbeneath; and ground pads 26 are connected by way of short traces (ground“stubs” or “jogs”) (e.g., 261) through ground vias (e.g., 262) to powertraces in a metal layer beneath.

In a typical conventional package having ˜1000 external terminals, forexample, there are at least 2 or 3 layers of signal wiring and at least4 or 5 layers of power/ground wiring in the substrate, which leads to atotal number of layers of approximately 6 or 8 or more. As a generalrule, an increase in number of signal wiring layers requires aconcomitant increase in power/ground layers owing to the need tomaintain a transmission line electrical environment in the package; andthis increases the total layer count still further. The need foradditional layers also results in longer signal paths, and manylayer-to-layer vias, adding undesirable electrical parasitics anddeterioration of performance.

In some conventional configurations, the core circuitry is situated inan area about the center of the die, and the input/output circuitry isarranged in cells, arranged to one side of or around the core circuitry.The input/output cells are typically generally rectangular in shape,much longer than wide, and are arranged near the die edge and orientedwith the longer dimension perpendicular to the die edge. A typicalinput/output cell has dimensions about 50 μm by 500 μm, although thecells can be made narrower for higher density interconnection.

FIG. 3 shows by way of example an embodiment of a die pad layout,generally at 30, according to the invention. The signal pads (e.g., 38)are in this example all arranged on the die surface 32 near theperimeter of the die, in rows parallel to the die edges 33. The signalpads have a finer pitch than the pads in the conventional mixed padfunction array of FIG. 1. The power pads (e.g., 34) and ground pads(e.g., 36) are arranged in an array (here having a central area free ofpads) on an inboard area of the die surface.

An arrangement of substrate pads according to the invention, andcorresponding to the die pad layout of FIG. 3 is shown by way of examplein a plan view generally at 40 in FIG. 4. The signal pads (e.g., 48),power pads (e.g., 44), and ground pads (e.g., 46), are arranged in acomplementary array on the substrate surface 42 so that they can receiveand be bonded respectively to the signal, power and ground bumpsattached to the corresponding pads on the die. In this arrangementaccording to the invention, all the pads associated with signal routing(e.g., 48) are at the perimeter of the array, and escape routing for thesignal pads on the perimeter of the array can directly cross beneath thedie edge (indicated at 43) as traces 481 in the uppermost metal layer ofthe substrate. Signal pads and power pads on the substrate, which inthis example are not at the perimeter of the array, are connected todeeper metal layers in the substrate by way of short traces and vias. InFIG. 4, for illustration, power pads 44 are connected by way of shorttraces (power “stubs” or “jogs”) (e.g., 441) through power vias (e.g.,442) to power traces in a metal layer beneath; and ground pads 46 areconnected by way of short traces (ground “stubs” or “jogs”) (e.g., 461)through ground vias (e.g., 462) to power traces in a metal layerbeneath.

Generally, in the embodiment of FIGS. 3 and 4 according to theinvention, all the signal lines are routed from the signal pads, passingaway from the die footprint, and all the power and ground lines arerouted to vias beneath the die footprint. Accordingly, no stubs or viasare required in the signal path, and parasitics in signal transmissionare avoided. The signal traces can be made as close together asavailable techniques for trace formation allow, although as is wellknown if they are made too close signal interference may occur inadjacent lines. The signal pads may be made as close together asavailable techniques for trace formation and bump bonding allow.

FIG. 5 shows, in a diagrammatic sectional view, a portion of a flip chippackage, generally at 50, having a die 53 mounted on a die attach regionof a surface of a substrate 54, having die pads and substrate pads androuting arranged according to an embodiment of the invention. The diepads (signal pads, e.g., 538; power pads, e.g., 534; and ground pads,e.g., 536) are formed on or in the active side 532 of die 53. Balls orbumps are attached to the die pads, and flip chip interconnection to thesubstrate is made by bonding the balls or bumps onto interconnect siteson corresponding patterned traces in the upper metal layer 501 of thesubstrate. Particularly, for example, signal bump 518 is attached tosignal pad 538, and is bonded to sites on signal traces 581; power bump514 is attached to power pad 534, and is bonded to sites on power traces541; and ground bump 516 is attached to ground pad 536, and is bonded tosites on ground traces 561.

The substrate 54 is preferably a “build-up” type substrate, having oneor more thinner alternating dielectric and metal layers (known as“build-up” layers) affixed onto each of the upper and lower surfaces ofa thicker middle two-layer substrate (known as the “core”). The build-upsubstrate typically has the same number of single metal layers on thetop as on the bottom. Thus a “1-2-1” build-up substrate has one thinnersingle metal layer affixed, with a dielectric layer, onto each the topand bottom of the core, making four metal layers in all; a “2-2-2”build-up substrate has two thinner single metal layers affixed, withdielectric layers, onto each the top and bottom of the core, making sixmetal layers in all; and a “3-2-3” build-up substrate has three thinnersingle metal layer substrates affixed, with dielectric layers, onto eachthe top and bottom of the core, making eight metal layers in all. Eachadditional set of build-up layers significantly raises the cost of thebuild-up substrate, and circuitry layouts that require fewer layers areaccordingly desirable.

The build-up process can entail applying a dielectric material in alayer upon the surface of the core (or on the surface of a previouslyestablished build-up layer), for example by a spin-on process; thenmetallizing the surface of the dielectric, and patterning themetallization (for example by a mask and etch process).

A buildup substrate typically includes as a core a printed circuit boardhaving patterned metal layers on top and bottom surfaces of a dielectric(hence, a “two metal layer” substrate). The thickness of the dielectricin such a printed circuit board is typically about 500 μm. As apractical matter, a features pitch in the metal layers on the core has alower limit in the range about 100 μm, and the vias capture pad diameterhas a lower limit in the range about 300 μm. The thickness of thedielectric in the thinner single build-up layers, by contrast, istypically about 50 μm. The metal layer on the build-up layers istypically thinner than those on the thicker core, and as a practicalmatter a features pitch in the metal layers in the build-up layers has alower limit in the range about 50 μm, and the vias capture pad diameterhas a lower limit in the range about 120 μm.

The substrate 54 in the embodiment of FIG. 5 is a four metal layersubstrate of a build-up “1-2-1” type. That is, the substrate 54 includesupper and lower thin single metal layer substrates 521, 523 formed overmiddle thicker two metal layer substrate 522. The two metal layersubstrate 522 has patterned upper and lower metal layers 502, 503. Thesingle metal layer substrates 521, 523 have patterned metal layers 501,504. Each of the patterned metal layers 501, 502, 503, 504 has tracesfor signal, power, and ground circuitry. For example, metal layer 502includes traces 562 dedicated to ground circuitry and traces 542dedicated to power circuitry; and metal layer 503 includes power traces543 and ground traces 563.

Lower metal layer 504 is patterned to provide bonding sites for secondlevel solder ball interconnection of the package at installation on, forexample, a printed circuit board such as a motherboard (not shown in theFIG.) of a device. Particularly, ground balls 568, signal balls 588, andpower balls 548 are attached to ground ball sites 567, signal ball sites587, and power ball sites 547, arrayed on the margin of the underside ofthe package substrate 54. And, optionally, core ground balls 569 andcore power balls 548 are attached to core ground ball sites 566 and corepower ball sites 546, arrayed beneath the die on the underside of thepackage substrate 54.

Upper ground traces 561 and power traces 541 include sites for flip chipattachment of ground and power bumps 516, 514, and are connected by vias564, 544 beneath the die footprint to traces 562, 542 in metal layer502; and traces 562, 542 are connected by vias 565, 545 to traces 563,543 in metal layer 503. Traces 563, 543 are, in turn, connected by viasto the second level interconnection sites 566, 546 (core ground and corepower) and 567, 547 (ground and power).

According to the invention, the die signal pads 538 are arranged nearthe perimeter of the die, and the corresponding signal lines 581 on thesubstrate are routed beneath the die edge 533 away from the diefootprint. As FIG. 5 shows, the signal traces 581 can be routed directlyto areas of the substrate generally overlying the second level signalball sites 587, so that the connection of the signal traces in the uppermetal layer 501 to the ball sites 587 can be shortened and madeprincipally by way of vias, for example 584, 585, with a minimum ofsignal circuitry within the lower metal layers 502, 503, 504. As may bedesirable, the second level signal balls (and the vias running downwardto them) can be situated between and near ground and power balls andvias.

Generally, ground lines in package substrates are preferably separatedfrom signal lines by distances comparable to (at least of the same orderof magnitude as) the distances between adjacent signal lines, so thatfield lines generated by signals go to ground rather than interferingwith other signals. Preferably, therefore, in a package according to theinvention the second metal layer operates principally as a ground plane,and the thickness of the dielectric in the upper metal layer is aboutequal to or less than the minimum spacing between adjacent signal lineson the upper layer. Accordingly, much of the fan-out ground circuitryfor the package 50 is formed in the second metal layer 502, which isseparated from the upper metal layer 501 only by the thin upper layerdielectric. In a 1-2-1 substrate as shown in FIG. 5 the thickness of thedielectric in the upper and lower single metal layer substrates may beabout 50 μm, and so where the nominal distance between adjacent signallines is about 50 μm or greater, a desirable spacing of ground andsignal lines is obtained to provide a stable microstrip-controlledimpedance transmission line environment for the signals.

As is discussed below, there are circumstances in which it may bepreferred to have a small number of selected signal pads located amongground and power pads in an inboard area of the die, that is, within thecore circuitry region of the die. Where the design demands, or where thedie circuitry makes it more preferable, a signal pad located amongground or power pads within the core circuitry region of a die may havea corresponding pad on the substrate within the footprint of corecircuitry region of the die, the die, and may be routed directlydownward in a via through the substrate core more to a bottom layer.

Other build-up substrates can be employed according to the invention,although as noted above the cost rises significantly as additionallayers are added, and substrates having fewer layers may be favored.Where a “2-2-2” substrate is used, the top and bottom build-up layerscan be patterned much as is described above for a “1-2-1” substrate. Themetal layers on the middle substrate can be employed primarily for powerrouting, and the metal layers on the build-up layers above and below themiddle substrate can be employed principally as ground planes. Wheregreater numbers layers are employed in build-up substrates, the layouton the substrate layers may be arranged so that signal vias are, to theextent practicable, surrounded by ground and power vias, to reducedegradation of the signal by electrical parasitics.

A four-layer laminate substrate may be used, without build-up layers,providing the features pitch and via capture pad design fits within thecoarse design rules of the core substrates. A conventional four-layercore laminate is sometimes referred to as a “0-4-0” substrate. Avoidingthe necessity of build-up can provide a significant cost reduction inlaminate preparation.

Other die pad layouts may be made according to the invention, having diesignal pads arranged near the perimeter of the die, and die power andground pads arranged on inboard from the signal pads; and othersubstrate arrangements may be made according to the invention, havingsignal pads arranged in a manner complementary to the die pad layout,and having signal lines routed from the signal pads beneath the die edgeaway from the die footprint and power and ground lines routed to viasbeneath the die footprint. FIGS. 6A, 7A, 8A and 9A show threeillustrative examples of pad layouts according to the invention, andFIGS. 6B, 7B, 8B and 9B show three illustrative examples ofcorresponding substrates according to the invention.

Referring now to FIG. 6A, there is shown by way of example an embodimentof a die pad layout, generally at 600, according to the invention. Thesignal pads (e.g., 68) are in this example all arranged on the diesurface 62 near the perimeter of the die, in an array of two staggeredrows parallel to the die edges 63. The signal pads are shown havingabout the same pitch as the pads in a single row embodiment such as inFIG. 3 and, as a result, a much greater number of signal pads may beaccommodated on the perimeter of the die. Alternatively, in someembodiments the same number of pads as in a single row embodiment can beaccommodated in two rows and staggered so that the pad pitch and paddiameter (and the corresponding interconnect bumps or balls) may begreater, reducing manufacture costs. The power pads (e.g., 64) andground pads (e.g., 66) in the embodiment of FIG. 6A are arranged in anarray (here having a central area free of pads) on an inboard area ofthe die surface, as in the example of FIG. 3. It should be noted thatmany more die pads may be present in a typical die than are shown by wayof illustration in the FIGs.; some die have several hundred pads, and atypical die, for example, may a total of 500 pads, including 150 powerand ground pads, and 350 signal pads.

An arrangement of substrate pads according to the invention, andcorresponding to the die pad layout of FIG. 6A is shown by way ofexample in a plan view generally at 602 in FIG. 6B. The signal pads(e.g., 680), power pads (e.g., 640), and ground pads (e.g., 660), arearranged on the substrate surface 620 in an array complementary to thedie pad layout of FIG. 6A, so that they can receive and be bondedrespectively to the signal, power and ground bumps attached to thecorresponding pads on the die 62. In this arrangement according to theinvention, all the pads associated with signal routing (e.g., 680) arein an array of two staggered rows at the perimeter of the array, andescape routing for the signal pads on the perimeter of the array candirectly cross beneath the die edge (indicated at 630) as traces 681 inthe uppermost metal layer of the substrate. As FIG. 6B shows, althoughthe signal pads 680 have about the same pitch as the pads in theembodiment of FIG. 4, the signal traces 681 have about half the pitch asdo the signal traces 481 of the embodiment of FIG. 4. That is, theescape density can be doubled for a given pad pitch. Signal pads andpower pads on the substrate, which in this example are not at theperimeter of the array, are connected to deeper metal layers in thesubstrate by way of short traces and vias. In FIG. 6B, for illustration,power pads 640 are connected by way of short traces (power “stubs” or“jogs”) (e.g., 641) through power vias (e.g., 642) to power traces in ametal layer beneath; and ground pads 660 are connected by way of shorttraces (ground “stubs” or “jogs”) (e.g., 661) through ground vias (e.g.,662) to power traces in a metal layer beneath.

FIG. 7A shows by way of example another embodiment of a die pad layout,generally at 700, according to the invention. The signal pads (e.g., 78)are in this example all arranged on the die surface 72 near theperimeter of the die, in a row parallel to the die edges 73. The signalpads are shown having about the same pitch as the pads in an embodimentsuch as in FIG. 3. Here, the power pads (e.g., 74) and ground pads(e.g., 76) are also arranged in a row, parallel to the die edge 73 andinboard of the row of signal pads 78. The power pads may, as illustratedhere, alternate with the ground pads in the row; and all the pads may beformed more closely by staggering the pads in the inner row with thesignal pads in the outer row.

Typically, the input/output circuitry in the active layer of the die isconfigured along the die perimeter, near one or more of the edges.Confining all the pads to rows near the perimeter of the die (forming a“pad ring”) allows a reduction in the die cost by reducing the amount ofon-die routing, and more conventional chip design tools can be employedin constructing the die.

An arrangement of substrate pads according to the invention, andcorresponding to the die pad layout of FIG. 7A is shown by way ofexample in a plan view generally at 702 in FIG. 7B. The signal pads(e.g., 780), power pads (e.g., 740), and ground pads (e.g., 760), arearranged on the substrate surface 720 in an array complementary to thedie pad layout of FIG. 7A, so that they can receive and be bondedrespectively to the signal, power and ground bumps attached to thecorresponding pads on the die 72. In this arrangement according to theinvention, all the pads associated with signal routing (e.g., 780) arein a row at the perimeter of the array, and escape routing for thesignal pads on the perimeter of the array can directly cross beneath thedie edge (indicated at 730) as traces 781 in the uppermost metal layerof the substrate. Ground pads and power pads on the substrate, which inthis example are inboard of the signal pads near the perimeter of thearray, are connected to deeper metal layers in the substrate by way ofshort traces and vias. In FIG. 7B, for illustration, power pads 740 areconnected by way of short traces (power “stubs” or “jogs”) (e.g., 741)through power vias (e.g., 742) to power traces in a metal layer beneath;and ground pads 760 are connected by way of short traces (ground “stubs”or “jogs”) (e.g., 761) through ground vias (e.g., 762) to power tracesin a metal layer beneath.

In an arrangement generally as in FIGS. 7A and 7B, a small number ofground pads and/or a small number of power pads (that is, a small numberof power/ground pads) can, in some embodiments, be situated in the outerrow, nearer the die edge; and in the substrate ground pads and/or powerpads can be arranged in a corresponding fashion. Configurations in whichthere are as many as 10% (more usually less than about 5%, still moreusually 0% or less than about 2%) of ground and power pads in the outerrow are within the invention, but locating power or ground pads in theoutside row results in a reduction in the signal pad escape density. Thesignal pad escape density can be maximized according to the invention byminimizing the number of power or ground pads in the periphery of thepad, and in some preferred embodiments there are no power pads or groundpads in the outside row. Similarly, a small number of signal pads can besituated among the power and ground pads inward from the periphery ofthe die, and in the substrate the signal pads can be arranged in acorresponding fashion. However, such arrangements may require employinga lower (and in some deigns an additional) substrate layer, entailingthe use of vias and increasing the signal path length.

As noted above, the signal pad escape density is maximized where thenumber of ground and/or power pads in the outer row are minimized and,accordingly the escape density can be at a maximum where there are noground pads or power pads in the outer row. However, a signal pad thatserves a particularly high frequency (high rf, for example) signal mayhave a ground pad adjacent on one side, or may be flanked on two sidesby a signal pad and a ground pad, for example, for electromagneticshielding of the signal. These present circumstances in which signal padescape density may be traded off to a limited extent, and arrangingpower and/or ground pads on two or three sides of a signal pad near theperiphery of the die may provide a useful compromise.

Still another embodiment of a die pad layout of the invention is shownby way of example generally at 800 in FIG. 8A. The signal pads (e.g.,88) are in this example as in the example of FIG. 7A all arranged on thedie surface 82 near the perimeter of the die, in a row parallel to thedie edges 83. The signal pads are shown having about the same pitch asthe pads in an embodiment such as in FIG. 3. Here, the power pads (e.g.,84) and ground pads (e.g., 86) are arranged in a row, parallel to thedie edge 83 and inboard of the row of signal pads 88. In this example,the power pads and grounds pads have been “depopulated”; that is, thereare (in this example) about half as many power and ground pads as in theExample of FIG. 7A. The power pads may, as illustrated here, alternatewith the ground pads in the row; and all the pads may be formed moreclosely by staggering the pads in the inner row with the signal pads inthe outer row.

Depopulating the power and ground pads allows for a layout having muchlarger ground vias and power vias under the shadow of the die, asillustrated by way of example in FIG. 8B, showing an arrangement ofsubstrate pads according to the invention, and corresponding to the diepad layout of FIG. 8A, in a plan view generally at 802. The signal pads(e.g., 880), power pads (e.g., 840), and ground pads (e.g., 860), arearranged on the substrate surface 820 in an array complementary to thedie pad layout of FIG. 8A, so that they can receive and be bondedrespectively to the signal, power and ground bumps attached to thecorresponding pads on the die 82. In this arrangement according to theinvention, all the pads associated with signal routing (e.g., 880) arein a row at the perimeter of the array, and escape routing for thesignal pads on the perimeter of the array can directly cross beneath thedie edge (indicated at 830) as traces 881 in the uppermost metal layerof the substrate. Ground pads and power pads on the substrate, which inthis example are inboard of the signal pads near the perimeter of thearray, are connected to deeper metal layers in the substrate by way ofshort traces and vias. In FIG. 8B, for illustration, power pads 840 areconnected by way of short traces (power “stubs” or “jogs”) (e.g., 841)through power vias (e.g., 842) to power traces in a metal layer beneath;and ground pads 860 are connected by way of short traces (ground “stubs”or “jogs”) (e.g., 861) through ground vias (e.g., 862) to power tracesin a metal layer beneath.

The diameter of the ground and power vias is generally made about 2 to 3times the line pitch. For greater power and ground via size, thealternating stubs can be of different lengths, so that the power andground vias are in a staggered array as shown by way of example in FIG.8B. Dimensions of some of the features of an exemplary embodiment as inFIG. 8B are as follows. For a signal line escape pitch, in this example,about 100 μm, an effective via pitch between the ground vias and powervias can be about 220 μm, and the via diameter can be as great as about250 μm. Substrates having larger vias can be much less costly, and sucha configuration can provide significant reductions in cost of thecompleted package.

Referring now to FIG. 9A, there is shown by way of example an embodimentof a die pad layout, generally at 900, according to the invention. Thesignal pads (e.g., 98) are in this example all arranged on the diesurface 92 near the perimeter of the die, in a generally orthogonalarray of two rows parallel to the die edges 93. The signal pads in eachrow are shown having about the same pitch as the pads in the outer rowin the embodiment of FIG. 6, and the inner and outer rows are spacedsomewhat farther apart than are adjacent pads in a single row embodimentsuch as in FIG. 3. There are, as a result, the same number of signalpads in the orthogonal perimeter array of FIG. 9A as in the staggeredperimeter array of FIG. 6A. In the example of FIG. 9A, the orthogonalperimeter signal pitch array occupies slightly greater area than doesthe staggered perimeter signal pitch array of FIG. 6A; however, thepitch between nearest adjacent pads in the orthogonal array is less thanthe pitch between nearest adjacent pads in the staggered array, so thatthe interconnect geometries (pad pitch and pad diameter, andcorresponding interconnect bumps or balls) may be greater, reducingmanufacture costs.

The power pads (e.g., 94) and ground pads (e.g., 96) in the embodimentof FIG. 9A are arranged in an array (here having a central area free ofpads) on an inboard area of the die surface, as in the example of FIGS.3 and 6A.

An arrangement of substrate pads according to the invention, andcorresponding to the die pad layout of FIG. 9A is shown by way ofexample in a plan view generally at 902 in FIG. 9B. The signal pads(e.g., 980), power pads (e.g., 940), and ground pads (e.g., 960), arearranged on the substrate surface 920 in an array complementary to thedie pad layout of FIG. 9A, so that they can receive and be bondedrespectively to the signal, power and ground bumps attached to thecorresponding pads on the die 92. In this arrangement according to theinvention, all the pads associated with signal routing (e.g., 980) arein an orthogonal array of two rows at the perimeter of the array, andescape routing for the signal pads on the perimeter of the array candirectly cross beneath the die edge (indicated at 930) as traces 981 inthe uppermost metal layer of the substrate. As FIG. 9B shows, the signaltraces 981 have about the same pitch as do the signal traces 981 of theembodiment of FIG. 9B. Signal pads and power pads on the substrate,which in this example are not at the perimeter of the array, areconnected to deeper metal layers in the substrate by way of short tracesand vias. In FIG. 9B, for illustration, power pads 940 are connected byway of short traces (power “stubs” or “jogs”) (e.g., 941) through powervias (e.g., 942) to power traces in a metal layer beneath; and groundpads 960 are connected by way of short traces (ground “stubs” or “jogs”)(e.g., 961) through ground vias (e.g., 962) to power traces in a metallayer beneath.

Generally, as in other embodiments according to the invention, thesignal lines in the embodiments of FIGS. 6B, 7B, 8B and 9B are routedfrom the signal pads, passing away from the die footprint, and all thepower and ground lines are routed to vias beneath the die footprint.Signal traces can all be routed in a single upper metal layer on thesubstrate. Accordingly, no stubs or vias are required in the signalpath, and parasitics in signal transmission are avoided. The signaltraces can be made as close together as available techniques for traceformation allow, although as is well known if they are made too closesignal interference may occur in adjacent lines. The signal pads may bemade as close together as available techniques for trace formation andbump bonding allow.

The foregoing examples illustrate embodiments in which no ground orpower interconnections are located among the signal interconnectsnearest the perimeter of the die (and die footprint on the substrate);and in which no signal interconnects are located among the power andground interconnections well within the core array about the middle ofthe die (and die footprint). As may be appreciated, in somecircumstances it may be desirable to locate one or a few signalinterconnections within the core array (usually, adjacent to groundinterconnects) and, accordingly, to route one or a few signal lines inthe substrate to a via beneath the die footprint, to connect with alower metal layer in the substrate (or, usually less desirably, to routesuch signal lines in the upper metal layer of the substrate from wellwithin the die footprint, and outward under the die edge). And, as maybe appreciated, in some circumstances it may be desirable to locate oneor a few power interconnections or, more usually, one or a few groundinterconnections more peripherally, among the signal interconnectionsnear the perimeter of the die and, accordingly, near the perimeter ofthe die footprint on the substrate. Just by way of example, it may beuseful in some circuit designs to situate a clock signal interconnectionnearer a ground interconnection. As may be appreciated from theforegoing, however, according to the invention all or substantially allthe die signal pads are located in a row or in an array near the dieperimeter; and all or substantially all the die power and ground padsare located inboard from substantially all the die signal pads.Particularly, the advantages of segregating signal pads near theperimeter from ground and power pads in the core can be significantlydegraded as the number or proportion of nonsegregated pads increases.According to the invention, the proportion of signal pads that are notin a perimeter row or a perimeter array is usually less than about 10%of all signal pads, more usually less than about 5% of all signal pads,and still more usually zero % or in the range zero % to about 2% of allsignal pads. And, according to the invention, the proportion of groundor power pads that are not inboard from the perimeter row or perimeterarray of signal pads is usually less than about 10% of all power andground pads, more usually less than about 5% of all power and groundpads, and still more usually zero % or in the range zero % to about 2%of all signal pads.

In the examples shown in the FIGs., the signal pads are shown in a rowor in an array along the entire perimeter of the die, that is, along allfour edges of the rectangular (for example, square) die. In someembodiments the signal pads are arranged along fewer than all the dieedges, and the advantages of the invention can be realized particularlyin embodiments in which the signal pads are in a peripheral row or aperipheral array along any two or more of the four die edges.

According to the invention flip chip packages can be made usingsubstrates having few layers, and circuitry on the various layers can beeffectively allocated according to function, reducing substrate cost aswell as improving performance.

Other embodiments are within the following claims.

What is claimed is:
 1. A method of manufacturing a semiconductor device,comprising: providing a substrate having a die attach region; forming aplurality of signal pads in a perimeter area of the die attach region;forming a plurality of signal escape lines extending outward from theperimeter area of the die attach region, the signal escape lines beingelectrically connected to the signal pads; forming a plurality of powerpads inboard from the perimeter area of the die attach region; andforming a plurality of ground pads inboard from the perimeter area ofthe die attach region, wherein less than 10% of the power pads andground pads are disposed in the perimeter area of the die attach region.2. The method of claim 1, wherein less than 10% of the signal pads aredisposed inboard from the perimeter area of the die attach region. 3.The method of claim 1, further including forming the signal pads in aplurality of rows arranged in a staggered or orthogonal configuration.4. The method of claim 1, further including forming the power pads andground pads in a plurality of rows arranged in a staggered or orthogonalconfiguration.
 5. The method of claim 1, wherein an area inboard fromthe perimeter area of the die attach region is devoid of the signalpads.
 6. The method of claim 1, wherein the perimeter area of the dieattach region is devoid of the power pads and ground pads.
 7. The methodof claim 1, further including: forming a first conductive layer disposedwithin the substrate and below the perimeter area of the die attachregion, the first conductive layer being electrically connected to thesignal pads; forming a second conductive layer disposed within thesubstrate and below an area inboard from the perimeter area of the dieattach region, the second conductive layer being electrically connectedto the power pads; and forming a third conductive layer disposed withinthe substrate and below the area inboard from the perimeter area of thedie attach region, the third conductive layer being electricallyconnected to the ground pads.